Measuring or checking instruments, appliances and machines, not specified or included elsewhere in this chapter; profile projectors; parts and accessories thereof:

9031.10.00.00Machines for balancing mechanical parts 9031.20.00.00Test benches 9031.41.00For inspecting semiconductor wafers or devices (including integrated circuits) or for inspecting photomasks or reticles used in manufacturing semiconductor devices (including integrated circuits) 9031.41.00.20For inspecting photomasks or reticles used in manufacturing semiconductor devices 9031.41.00.40For wafers 9031.41.00.60Other 9031.49Other: 9031.49.10.00Profile projectors 9031.49.40.00Coordinate-measuring machines 9031.49.70.00For inspecting masks (other than photomasks) used in manufacturing semiconductor devices; for measuring surface particulate contamination on semiconductor devices 9031.49.90.00Other 9031.80Other instruments, appliances and machines: 9031.80.40.00Electron beam microscopes fitted with equipment specifically designed for the handling and transport of semiconductor wafers or reticles 9031.80.80Other 9031.80.80.60For testing electrical characteristics 9031.80.80.70Other 9031.80.80.85Other 9031.90Parts and accessories: 9031.90.21.00Of profile projectors 9031.90.45.00Bases and frames for the coordinate-measuring machines of subheading 9031.49.40 9031.90.54.00Of optical instruments and appliances of subheading 9031.41 or 9031.49.70 9031.90.59.00Other 9031.90.70.00Of articles of subheading 9031.80.40 9031.90.91Other 9031.90.91.30Of machines for balancing mechanical parts 9031.90.91.60Of test benches 9031.90.91.95Other