The tariff classification of an ECR/Microwave Etching System from France.
Issued November 21, 1995 by U.S. Customs and Border Protection.
Cite this ruling
Copies to clipboard81 816031 (November 21, 1995)
Tariff classification
HTS codes: 8456.90.6000
Headings: 8456
Product description
The Nextral NE 860 ECR (Electron Cyclotron Resonance) /Microwave Etching System is used primarily as a diagnostic tool for failure analysis. It is dedicated to removal of layers on wafers as well as packaged dice. It consists of an ECR/Microwave etching reactor, cathode, high conductance pumping system, electronic control for vacuum, gas handling and RF, high voltage power supplies, gas panel in a cabinet with 5 gas lines, RF and HF generator, temperature regulation system and Nextral automatic process controller. The ion energy between 5 to 50 V is accurately controlled to +- 0.1 V.
CBP rationale
The applicable subheading for the Nextral NE 860 ECR/Microwave Etching System will be 8456.90.6000, Harmonized Tariff Schedule of the United States (HTS), which provides for machine tools for working any material by removal of material, by laser or other light or photon beam, ultrasonic, electro-discharge, electro-chemical, electron-beam, ionic-beam or plasma arc processes: other: other: dry etching (including plasma) machines designed to process semiconductor wafers.
Full text
NY 816031 November 21, 1995 CLA-2-84:R:N1:104 816031 CATEGORY: Classification TARIFF NO.: 8456.90.6000 Mr. Walter J. Dolan, Jr. Balzers 8 Sagamore park Road Hudson, NH 03051 RE: The tariff classification of an ECR/Microwave Etching System from France. Dear Mr. Dolan: In your letter dated October 16, 1995 you requested a tariff classification ruling. The Nextral NE 860 ECR (Electron Cyclotron Resonance) /Microwave Etching System is used primarily as a diagnostic tool for failure analysis. It is dedicated to removal of layers on wafers as well as packaged dice. It consists of an ECR/Microwave etching reactor, cathode, high conductance pumping system, electronic control for vacuum, gas handling and RF, high voltage power supplies, gas panel in a cabinet with 5 gas lines, RF and HF generator, temperature regulation system and Nextral automatic process controller. The ion energy between 5 to 50 V is accurately controlled to +- 0.1 V. The applicable subheading for the Nextral NE 860 ECR/Microwave Etching System will be 8456.90.6000, Harmonized Tariff Schedule of the United States (HTS), which provides for machine tools for working any material by removal of material, by laser or other light or photon beam, ultrasonic, electro-discharge, electro-chemical, electron-beam, ionic-beam or plasma arc processes: other: other: dry etching (including plasma) machines designed to process semiconductor wafers. The rate of duty will be Free. This ruling is being issued under the provisions of Section 177 of the Customs Regulations (19 C.F.R. 177). A copy of the ruling or the control number indicated above should be provided with the entry documents filed at the time this merchandise is imported. If you have any questions regarding the ruling, contact National Import Specialist Robert Losche at 212-466-5670. Sincerely, Roger J. Silvestri Director National Commodity Specialist Division
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